Topography & Roughness

System: S neox / Sensofar

Non-contact 3D surface measurement, optionally by means of confocal microscopy, interferometry (white light and phase shift interferometry) or focus variation. Thanks to a large selection of objectives, we can thus find the suitable method for every problem.

Useful tips:

Suitable samples:
  • Solids, foils etc.
Sample specifications:
  • Thanks to a 1 m long column for the measuring head, larger samples can also be examined.
Range/Options:
  • z-resolution: from 2 nm for confocal microscopy, 1 nm for white light interferometry and sub-nm for phase shift interferometry
  • xy-resolution: from 0.15 µm (100X objective)
  • Measuring range: By stitching (joining several measuring ranges), the measuring range can be extended almost at will, ultimately limited by the measuring time and the range of the stage (114 x 75 mm)
  • Surface roughness: Determination of all possible surface roughness parameters thanks to professional evaluation software.
  • Roughness of profiles: A set of profiles can be extracted from the topographies and based on these profiles all possible roughness values can be determined, not only Ra...
  • Shapes: From the topography we can determine, for example, step heights, edge rounding or the flatness of small areas.

Application(s)

  • Roughness measurement in quality assurance
  • Comparison of different surface finishing processes
  • Topography of coatings
  • Edge rounding of cutting tools or of electropolished components
  • Shape changes of etched wafers
  • Your specific question

Standards

  • ISO 25178-2:2012             Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters
  • ISO 25178-3:2012             Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
  • ISO 21920-1:2021             Geometrical product specifications (GPS) — Surface texture: Profile — Part 1: Indication of surface texture
  • ISO 21920-2:2021             Geometrical product specifications (GPS) — Surface texture: Profile — Part 2: Terms, definitions and surface texture parameters
  • ISO 21920-3:2021             Geometrical product specifications (GPS) — Surface texture: Profile — Part 3: Specification operators

Withdrawn Standards:

  • ISO 4287, ISO 4288

 

Contact:  Roman Heuberger +41 32 644-2022

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