Energy dispersive micro analysis (EDX) Overview metals

System: Scanning electron microscope Zeiss Sigma 300 VP + EDX (AZtec Oxford with UltimMax 40 detector)

Qualitative and quantitative analysis of the surface of solid or powder materials using energy dispersive X-ray (EDX) analysis in a scanning electron microscope (SEM) to identify the elements boron to uranium. Quantitative analyses allow the content of selected elements to be determined.

Useful tips:

Suitable samples: Solid, Powder
Sample specifications:
  • solids: up to 40 x 40 [mm], possibly larger
  • Powder samples: only a few particles necessary
  • Lateral resolution: approx. 1 µm, depending on sample composition.
  • Elements lighter than aluminum ≈ 0.4 - 0.5%
  • Elements heavier than aluminum ≈ 0.2 - 0.3%
  • Mapping: element distribution images
  • Linescan: Concentration profiles along a measurement line



  • Elemental composition of various solids


  • ASTM E1508:        Quantitative Analyse von Energie-Spektroskopie


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